磨削操作;磨削作用
The grinding action of the molars requires coordinated and synchronized contraction of the muscles of mastication.
而臼齿作咀嚼动作时,需靠咀嚼肌协调而一致的收缩.
Based on the G-W contact model and Hertz theory, the contact status between polishing pad and wafer is analyzed at first. A mathematic model of material removal in polishing is obtained by means of the grinding action of single abrasive.
本文首先基于随机表面的G-W接触模型和赫兹弹性理论分析了抛光垫与晶片的接触情况,从单颗磨料的磨削作用出发,推导出抛光过程中材料去除率的数学模型。
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